Request #2018.1

Surface passivation of Silicon MEMS devices

Background

AMG Technology is looking for a technology for surface passivation of Silicon MEMS devices comprising thin flexures. The considered passivation coatings should provide corrosion protection and their thickness should be in the range of up to 1 um. Preferably, coating deposition to be implemented on completed (COB bonded) devices.

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Date published04/17/2018Technology areasAdditive Manufacturing (3D printing)NanotechnologiesSemiconductor ManufacturingSensors, Actuators, MEMS and RF