AMG Technology Ltd offers a technology for prototyping of silicon MEMS devices suitable for in-situ measurement of multiple parameters. Devices comprise plurality of functional integrated micro flexures with sidewall embedded piezo resistors, each selectively responding to a targeted parameter. By means of detecting of single nm displacements, the miniaturized multi-sensing devices can be applied in various domains ranging from top performing analytical equipment and nanotechnologies, to monitoring large objects like industrial equipment, structural health monitoring, smart buildings, etc.
Besides very high performance, the envisaged technology enables very competitive overall cost of entire measuring/monitoring systems.